книги Наука, техника, медицина Техника Легкая промышленность

Amorphous Silicon Carbide for MEMS Applications. Process Development and Techniques of Integration with Stereolithographic Structures

Код 1320233

Нет в продаже

Аннотация к книге "Amorphous Silicon Carbide for MEMS Applications. Process Development and Techniques of Integration with Stereolithographic Structures"

This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a...

Оставить комментарий

Оцените книгу:

Издательство: Книга по требованию
Дата выхода: июль 2011
ISBN: 978-3-6393-0527-2
Объём: 180 страниц
Масса: 295 г
Размеры(высота, ширина, толщина), см: 23 x 16 x 1

Книга находится в категориях

Химическая промышленность

Вместе с этой книгой покупают